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AssigneeApplied Materials, Inc.
InventorsHong Wang, Yongxiang He, Yixing Lin, Edwin C. Weldon, Clifford Stow
Estimating the term…
A substrate processing chamber has a component having a surface that is exposed inside the chamber. The exposed surface can have a pattern of recesses that are spaced apart from one another, each recess having an opening, sidewalls, and a bottom wall. The recesses are formed by directing a pulsed laser beam onto a position on a surface of the structure for a time sufficiently long to vaporize a portion of the structure at that position. The component can also be a gas distributor having an enclosure with plurality of laser drilled gas outlets having first and second openings with different diameters to reduce an ingress of a plasma into the enclosure. The laser drilled gas outlets can also have rounded edges.
A component for a substrate processing chamber, the component comprising a structure having a surface that is at least partially exposed in the chamber, the surface having a pattern of laser drilled recesses that are spaced apart from one another, each recess having an opening, sidewalls, and a bottom wall.
A method of fabricating a component for a substrate processing chamber, the method comprising:
A process gas distributor for distributing a process gas into a substrate processing chamber, the gas distributor comprising:
A process gas distributor for distributing a process gas into a substrate processing chamber, the gas distributor comprising:
A kit for a substrate processing chamber, the kit comprising a plurality of components, each component comprising a structure having a surface that is at least partially exposed in the chamber, the surface having a pattern of laser drilled recesses that are spaced apart from one another, each recess having an opening, sidewalls, and a bottom wall.
A kit for a substrate processing chamber, the kit comprising a plurality of components that include a deposition ring, cover ring, upper gas shield, and lower gas shield, each component comprising a structure having a surface that is at least partially exposed in the chamber, the surface being substantially entirely covered with a pattern of laser drilled recesses that are spaced apart from one another, each recess having an opening, sidewalls, and a bottom wall.
Dependencies are inferred from the claim text.