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US 2003/0188683 A1Published application
UV reactor for transport polymerization
AssigneeDielectric Systems, Inc.
InventorsChung J. Lee, Oanh Nguyen, Atul Kumar
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Abstract
An improved reactor to facilitate new precursor chemistries and transport polymerization processes that are useful for preparations of low ε (dielectric constant) films. An improved TP Reactor that consists of UV source and a fractionation device for chemicals is provided to generate useful reactive intermediates from precursors. The reactor is useful for the deposition system.
Claims39
An ultra violet (“UV”) reactor subsystem useful for making a thin film from a precursor comprising:
- (a) a vacuum vessel fabricated from an UV transparent material having a liquid level control and a temperature control;
- (b) an inlet in fluid communication with the vacuum vessel;
- (c) a fractionation column having a temperature control fluid in fluid communication with an outlet;
- (d) a vapor flow controller (“VFC”) valve in fluid communication with the fractionation column;
- and
- (e) an UV energy source in a spaced relationship with the vacuum vessel.
3 more elements
An ultra violet (“UV”) reactor subsystem useful for making a thin film from a precursor comprising:
- (a) a heated precursor vessel in fluid communication with a vapor flow controller (“VFC”) valve;
- (b) a vacuum vessel fabricated from an ultraviolet (“UW”) transparent material having a level control, and a temperature control;
- (c) an inlet on the vacuum vessel in fluid communication with the VFC;
- (d) a fractionation column having a temperature control fluid in fluid communication with an outlet on the vacuum vessel;
- and
- (e) an ultra violet (“UV”) energy source in a spaced relationship with the vacuum vessel.
3 more elements
Dependencies are inferred from the claim text.