Heat exchanger for high purity fluid handling systems

A heat exchanger comprising:

• a first plate having at least one channel formed therein, said channel having straight sections and curved sections;
• a tube having straight sections and corrugated sections, said straight sections of said tube disposed in said straight sections of said channel of said first plate, and said corrugated sections of said tube disposed in said curved sections of said channel of said first plate;
• a second plate coupled to said first plate, said second plate having at least one channel complementary to said channel of said first plate for accepting said tube;
• a third plate coupled to said second plate, said third plate having at least one channel formed therein, said channel having straight sections and curved sections;
• a second tube having straight sections and corrugated sections, said straight sections of said second tube disposed in said straight sections of said channel of said third plate, and said corrugated sections of said tube disposed in said curved sections of said channel of said third plate;
• a fourth plate coupled to said third plate, said fourth plate having at least one channel complementary to said channel of said third plate for accepting said second tube;
• and
• at least one heater thermally coupled to one of said plates.

A heat exchanger comprising:

• a first plate having a plurality of straight channels formed therein, said straight channels arranged parallel to one another;
• a tube having straight sections and corrugated sections, each of said straight sections of said tube being disposed in one of said channels of said first plate, and said corrugated sections of said tube being disposed outside said first plate, the spacing between each of said channels of said first plate being less than or equal to 1.5 times the diameter of said tube;
• a second plate coupled to said first plate, said second plate having a plurality of channels complementary to said straight channels of said first plate for thermally engaging said straight sections of said tube;
• a third plate coupled to said second plate, said third plate having a plurality of straight channels formed therein, said channels of said third plate being arranged parallel to one another;
• a second tube having straight sections and corrugated sections, each of said straight sections of said tube being disposed in one of said channels of said third plate, and said corrugated sections of said second tube being disposed outside said third plate, the spacing between each of said channels of said third plate being less than or equal to 1.5 times the diameter of said second tube;
• a fourth plate coupled to said third plate, said fourth plate having a plurality of channels complementary to said plurality of channels of said third plate for thermally engaging said straight sections of said second tube;
• a first plurality of thermoelectric chips in thermal contact with a side of said first plate opposite said channels of said first plate;
• a second plurality of thermoelectric chips in thermal contact with a side of said fourth plate opposite said channels of said fourth plate;
• a first heat sink coupled to said first plurality of thermoelectric chips;
• and
• a second heat sink coupled to said second plurality of thermoelectric chips.