Magnetic head manufacturing method

A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the upper write pole, comprising the steps of:

• forming the magnetic gap on the projection of the lower write pole;
• forming a non-magnetic material layer on the lower write pole, the non-magnetic material layer having a projection on its top surface in positional alignment with the projection of the lower write pole;
• forming a mask layer on the non-magnetic material layer, the mask layer having an opening in which the top surface of the projection of the non-magnetic material layer is exposed;
• forming a first recess in the non-magnetic material layer by isotropically etching the non-magnetic material layer through the opening of the mask layer;
• forming a second recess down from the bottom of the first recess by anisotropically etching the non-magnetic material layer through the opening of the mask layer;
• and
• forming the projection of the upper write pole by burying a magnetic material in the second recess and the first recess.

A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the upper write pole, comprising the steps of:

• forming the magnetic gap on the projection of the lower write pole;
• forming a first non-magnetic material layer stacked on the lower write pole and having on its top surface a first recess in positional alignment with the projection of the lower write pole;
• forming a plugging material different from the first non-magnetic material layer in the first recess;
• forming a second multi-layered structure on the first non-magnetic material layer;
• forming on the second non-magnetic material layer a mask layer having an opening in positional alignment with the projection of the lower write pole;
• forming a second recess by isotropically etching the second non-magnetic material layer through the opening of the mask layer until exposing the plugging material;
• removing the plugging material from the second recess;
• and
• forming the upper write pole by burying a magnetic material in the first recess and the second recess.

A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the upper write pole, comprising the steps of:

• forming the magnetic gap on the projection of the lower write pole;
• forming a first non-magnetic material layer stacked on the lower write pole and having a first recess on its surface in positional alignment with the projection of the lower write pole;
• forming an umbrella-shaped mask which includes a foot portion buried in the first recess, a stem portion extending upward from the first non-magnetic material layer, and an overhang portion at a distance from the first non-magnetic material layer;
• forming a non-magnetic material to make of the first non-magnetic material layer a second non-magnetic material layer having a second recess formed under the overhang portion of the mask;
• removing the mask;
• and
• forming the projection of the upper write pole by burying a magnetic material in the first recess and the second recess.

A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the upper write pole, comprising the steps of:

• forming the magnetic gap on the projection of the lower write pole;
• forming a first non-magnetic material layer stacked on the lower write pole and having a first recess on its surface in positional alignment with the projection of the lower write pole;
• forming a plugging material on the first non-magnetic material layer;
• inviting self-contraction of the plugging material to make a plugging body which has a foot portion buried in the first recess and a round portion spreading out above the foot portion;
• forming a non-magnetic material to make on the first non-magnetic material layer a second non-magnetic material layer having a second recess made under the liquid drop portion of the plugging body;
• removing the plugging body;
• and
• forming the projection of the upper write pole by burying a magnetic material in the first recess and the second recess.