US 2003/0171468 A1Published application

Radiation-sensitive composition changing in refractive index and utilization thereof

AssigneeJsr Corporation

InventorsIsao Nishimura, Nobuo Bessho, Atsushi Kumano, Kenji Yamada

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Abstract

A composition whose refractive index of a material is changed by a simple method, which can have a sufficiently large refractive index difference, and which provides a stable refractive index pattern and an optical material irrespective of their use conditions and a method for forming the refractive index pattern and the optical material. The above composition comprises (A) a decomposable compound, (B) a hydrolyzate of an alkoxide such as tetrabutoxytitanium, tetramethoxyzirconium, tetramethoxygermanium or tetramethoxysilane, or a halogen compound such as tetrachlorosilane and (C) a radiation sensitive decomposer and is sensitive to radiation.

Claims14

Dependent claims

A composition comprising:

(A) a decomposable compound,
(B) a hydrolyzate of at least one compound selected from the group consisting of an alkoxide represented by the following formula (1′):
M(or)mYn (1′)
wherein M is a positive divalent to pentavalent atom, R is an alkyl group or aryl group, Y is a hydrogen atom, alkyl group, aryl group, hydroxyl group, alkoxyl group or aryloxy group, and m and n are each independently an integer of 0 or more, with the proviso that (m+n) is equal to the valence of M,
and a halogen compound represented by the following formula (2′):
MXmYn (2′)
wherein M, Y, m and n are as defined in the above formula (1′), and X is a halogen atom, and
(C) a radiation sensitive decomposer.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 10/275,285Filed 13 Nov 2002
Priority: JP 2001-07015113 Mar 2001
Published: 11 Sep 2003
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

G03F 7/039
Photosensitive materials: macromolecular compounds which are photodegradable, e.g. positive electron resists
G02B 1/04
Optical elements characterised by the material of which they are made; Optical coatings for optical elements: made of organic materials, e.g. plastics
G03F 7/001
Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor: phase modulating…
G03F 7/0042
Photosensitive materials: with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists