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US 2003/0170563 A1Published application
Photosensitive polymer and chemically amplified photoresist composition containing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsDong-Won Jung, Sang-Jun Choi, Si-Hyeung Lee, Sook Lee
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Abstract
The photosensitive polymer includes a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent, and a second monomer which is maleic anhydride. A chemically amplified photoresist composition, containing the photosensitive polymer, has an improved etching resistance and adhesion to underlying layer materials, and exhibits wettability to developing solutions.
Claims26
A photosensitive polymer comprising:
- a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent;
- and
- a second monomer which is maleic anhydride.
A photosensitive polymer comprising:
- a first monomer selected from the group consisting of norbornene having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylic acid, norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxy group pendent thereto as a substituent, and norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxylic anhydride group pendent thereto as a substituent;
- a second monomer which is maleic anhydride;
- and
- a third monomer selected from the group consisting of norbornene ester having a C6 to C20 aliphatic hydrocarbon group as a substituent and (meth)acrylate having a C6 to C20 aliphatic hydrocarbon group as a substituent, and
- wherein the weight average molecular weight of the polymer is in the range of 3,000 to 100,000.
2 more elements
A photosensitive polymer comprising:
- a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent;
- a second monomer which is maleic anhydride;
- a third monomer selected from the group consisting of norbornene carboxylic acid, norbornene ester having a C6 to C20 aliphatic hydrocarbon group as a substituent and norbornene ester having an acid-labile group as a substituent;
- and
- a fourth monomer selected from the group consisting of (meth)acrylic acid, (meth)acrylate having C1 to C12 aliphatic alcohol as a substituent, (meth)acrylate having an acid-labile group as a substituent and(meth)acrylate having an aliphatic hydrocarbon group as a substituent, and
- wherein the weight average molecular weight of the polymer is in the range of 3,000 to 100,000.
3 more elements
A photosensitive polymer comprising:
- a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent;
- a second monomer which is maleic anhydride;
- a third monomer selected from the group consisting of norbornene carboxylic acid, norbornene ester having a C6 to C20 alicyclic hydrocarbon group as a substituent and norbornene ester having an acid-labile group as a substituent;
- and
- a fourth monomer which is (meth)acrylate having a C6 to C20 alicyclic hydrocarbon group as a substituent, and
- wherein the weight average molecular weight of the polymer is in the range of 3,000 to 100,000.
3 more elements
A photosensitive polymer comprising:
- a first monomer selected from the group consisting of norbornene having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylic acid, norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxy group pendent thereto as a substituent, norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxylic anhydride group pendent thereto as a substituent, and norbornene ester having C1 to C12 aliphatic alcohol with a carboxylic anhydride group pendent thereto as a substituent;
- a second monomer which is maleic anhydride;
- a third monomer which is norbornene ester having an acid-labile group as a substituent;
- and
- a fourth monomer which is norbornene ester having a C6 to C20 alicyclic hydrocarbon group as a substituent, and
- wherein the weight average molecular weight of the polymer is in the range of 3,000 to 100,000.
3 more elements
A chemically amplified photoresist composition comprising:
- one or more photosensitive polymers each having an average-weight molecular weight of 3,000 to 100,000, and selected from the group consisting of first through sixth photosensitive polymers;
- and
- a photoacid generator contained in an amount of 1 to 15% by weight based on the total weight of the one or more photosensitive polymers, and
- wherein the first photosensitive polymer includes a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent, and a second monomer which is maleic anhydride;
- wherein the second photosensitive polymer includes a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent, a second monomer which is maleic anhydride, a third monomer selected from the group consisting of norbornene carboxylic acid, norbornene ester having a C6 to C20 alicyclic hydrocarbon group as a substituent, norbornene ester having an acid-labile group as a substituent, (meth)acrylic acid, (meth)acrylate having C1 to C12 aliphatic alcohol as a substituent, (meth)acrylate having an acid-labile group as a substituent, and (meth)acrylate having a C6 to C20 alicyclic hydrocarbon group as a substituent;
- wherein the third photosensitive polymer includes a first monomer selected from the group consisting of norbornene having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylic acid, norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxy group pendent thereto as a substituent, and norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxylic anhydride group pendent thereto as a substituent, a second monomer which is maleic anhydride, and a third monomer selected from the group consisting of norbornene ester having a C6 to C20 aliphatic hydrocarbon group as a substituent and (meth)acrylate having a C6 to C20 aliphatic hydrocarbon group as a substituent;
- wherein the fourth photosensitive polymer includes a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent, a second monomer which is maleic anhydride, a third monomer selected from the group consisting of norbornene carboxylic acid, norbornene ester having a C6 to C20 aliphatic hydrocarbon group as a substituent and norbornene ester having an acid-labile group as a substituent, and a fourth monomer selected from the group consisting of (meth)acrylic acid, (meth)acrylate having C1 to C12 aliphatic alcohol as a substituent, (meth)acrylate having an acid-labile group as a substituent and (meth)acrylate having an aliphatic hydrocarbon group as a substituent;
- wherein the fifth photosensitive polymer includes a first monomer which is norbornene ester having C1 to C12 aliphatic alcohol as a substituent, a second monomer which is maleic anhydride, a third monomer selected from the group consisting of norbornene carboxylic acid, norbornene ester having a C6 to C20 alicyclic hydrocarbon group as a substituent and an acid-labile group pendent to the norbornene ester, and a fourth monomer which is (meth)acrylate having a C6 to C20 alicyclic hydrocarbon group as a substituent;
- and
- wherein the sixth photosensitive polymer includes a first monomer selected from the group consisting of norbornene having C1 to C12 aliphatic alcohol as a substituent, norbornene carboxylic acid, norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxy group pendent thereto as a substituent, norbornene having a C1 to C12 aliphatic hydrocarbon group with a carboxylic anhydride group pendent thereto as a substituent, and norbornene ester having C1 to C12 aliphatic alcohol with a carboxylic anhydride group pendent thereto as a substituent, a second monomer which is maleic anhydride, a third monomer which is norbornene ester having an acid-labile group as a substituent, and a fourth monomer which is norbornene ester having a C6 to C20 alicyclic hydrocarbon group as a substituent.
7 more elements
Dependencies are inferred from the claim text.