Variable optical attenuator

A variable optical attenuator comprising:

• a transmitting fiber for transmitting light;
• a receiving fiber for receiving light from said transmitting fiber;
• an attenuating module provided between said transmitting and receiving fibers for attenuating light and having a transmitting unit, an attenuating unit and a receiving unit;
• an actuator for driving said attenuating unit;
• and
• a substrate supporting said transmitting fiber, said receiving fiber, said attenuating module and said actuator.

A method of fabricating a variable optical attenuator comprising the following steps of:

• depositing a sacrificing layer on a substrate;
• forming a silicon device layer on the sacrifice layer;
• forming a planar waveguide layer on the silicon device layer;
• patterning the planar waveguide layer through etching to divide the same into three portions;
• patterning the silicon device layer through etching to divide the same into three portions;
• removing the middle portions of the planar waveguide layer and the silicon device layer divided into the tree portions, respectively;
• and
• bonding optical fibers to both sides of the remaining portions of the planar waveguide layer and the silicon device layer divided into the tree portions.