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AssigneeTherma-Wave, Inc.
InventorsJames Hendrix, David Wang, Michael Ellison, Joel Ng
Estimating the term…
A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.
A light source for an optical metrology tool which comprises:
A device for splitting or combining light beams, the device comprising:
A method of optically inspecting and evaluating a subject comprising the steps of:
A device for optically inspecting and evaluating a subject, the device comprising:
Dependencies are inferred from the claim text.