US 2003/0169418 A1 · Surface state inspecting method and substrate inspecting apparatus

Abstract

In a substrate inspecting apparatus comprising a projecting section (4) in which light sources (8), (9) and (10) are provided for emitting colored lights of R, G and B in directions having different elevation angles, one or two color components which is/are greater than the mean value of the intensities of color components is/are extracted for an inspecting region including a soldered portion. Inclined surfaces adapted to the light sources (8), (9) and (10) are converted into monochromatic shaded images by the extraction processing. A boundary position between the inclined surfaces adapted to the light sources (8) and (9) are converted into one shaded image having a mixed color of red and green and the boundary position between the inclined surfaces adapted to the light sources (9) and (10) is converted into a different shaded image.

Claims9

Dependent claims

A surface state inspecting method comprising the steps of:

picking up an image of a light reflected from an inspection object under an illumination condition in which different colored lights are irradiated in a plurality of directions having different elevation angles with respect to the inspection object;
selecting and executing a processing of extracting one color component having a maximum intensity in color components corresponding to the colored lights or a processing of extracting the color component having a maximum intensity and a color component having the second highest intensity for each pixel in an image region including an image of the inspection object based on a relationship between the intensities of the color components with respect to the image obtained by the image pick-up;
and
inspecting a surface state of the inspection object by using image data indicative of a result of the processing of extracting a color component in the image region.

1 more element

A substrate inspecting apparatus comprising:

illuminating means having a plurality of light sources for emitting different colored lights which are provided in directions of different elevation angles with respect to a substrate to be an inspection object, respectively;
image pick-up means for picking up an image of a light reflected from the substrate;
image input means for fetching an image generated by the image pick-up means in a state in which each of the light sources of the illuminating means is turned on;
color component extracting means for selecting and executing a processing of extracting one color component having a maximum intensity in color components corresponding to the light sources or a processing of extracting the color component having a maximum intensity and a color component having the second highest intensity based on a relationship of an intensity of each color component for each pixel in an image region including an image of the inspection object with respect to the input image fetched by the image input means;
deciding means for deciding a suitability of a surface state of the inspection object by using image data in the image region after executing the processing by the color component extracting means;
and
output means for outputting a result of the decision carried out by the deciding means.

4 more elements

Dependencies are inferred from the claim text.

Surface state inspecting method and substrate inspecting apparatus

Life of this patent

Surface state inspecting method and substrate inspecting apparatus

Life of this patent

Abstract

Claims9