Pedestal
OwnerGordon Robert Green, Robert Kenneth Trowellinventors
Life of this patent
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Abstract
A pedestal for mounting semiconductor fabrication equipment within a clean room. The pedestal includes a base frame sitting on a waffle slab and utility connections. The equipment can readily be connected to the utility connections when positioned on the pedestal. The utility connections are located at the periphery of or across part of a face of the pedestal to thereby define a service area within the periphery.
Claims8
A pedestal (3) for mounting semiconductor fabrication equipment (4) within a clean room, the pedestal including:
- a base frame (3a) for seating on a waffle slab (2), and
- utility connections (5), whereby the equipment can readily be connected thereto when positioned on the pedestal and wherein the utility connections are located at the periphery of or across part of a face of the pedestal to thereby define a service area within the periphery.
An open frame pedestal (3) for semiconductor fabrication equipment (4) within a clean room, in use the pedestal being seated on a waffle slab (2) and carrying utility connections (5) and/or ancillary equipment (7a).
Dependencies are inferred from the claim text.