Chemical mechanical polishing slurry

A laser pyrolysis particle forming method comprising:

• providing a reaction flow path comprising a plurality of laser application zones;
• feeding a first set of precursors to a first in sequence of the laser application zones along the reaction flow path;
• applying laser energy to the first set of precursors in the first in sequence of the laser application zones effective to react and form solid particles from the first set of precursors;
• feeding the solid particles and a second set of precursors to a subsequent in sequence of the laser application zones along the flow path;
• and
• applying laser energy to the subsequent in sequence of the laser application zones effective to react and form solid material about the solid particles from the second set of precursors.

A laser pyrolysis particle forming method comprising:

• providing a reaction flow path comprising at least first and second spaced laser application zones, at least a first precursor inlet to the reaction flow path in advance of the first laser application zone, and at least a second precursor inlet to the reaction flow path between the first and second spaced laser application zones;
• feeding at least one precursor through the first inlet to the reaction flow path in advance of the first laser application zone;
• feeding the at least one precursor fed from the first precursor inlet along the reaction flow path to the first laser application zone;
• applying laser energy in the first laser application zone effective to react and form solid particles from the at least one precursor fed from the first inlet;
• feeding the solid particles from the first laser application zone along the reaction flow path to between the first and second spaced laser application zones;
• feeding at least one precursor through the second precursor inlet into the reaction flow path between the first and second laser application zones having the solid particles flowing therein;
• feeding the at least one precursor fed from the second precursor inlet and the solid particles along the reaction flow path to the second laser application zone;
• and
• applying laser energy in the second laser application zone effective to react and form solid material about the solid particles from the at least one precursor fed from the second inlet.

A particle forming method comprising:

• feeding a first set of precursors to a first energy application zone;
• first applying energy to the first set of precursors in the first energy application zone effective to react and form solid particles from the first set of precursors;
• ceasing application of any effective energy to the solid particles and feeding the solid particles and a second set of precursors to a second energy application zone;
• and
• second applying energy to the second set of precursors in the second energy application zone effective to react and form solid material about the solid particles from the second set of precursors.

A particle forming method comprising:

• providing a reaction flow path comprising a plurality of energy application zones;
• feeding a first set of precursors to a first in sequence of the energy application zones along the reaction flow path;
• applying energy to the first set of precursors in the first in sequence of the energy application zones effective to react and form solid particles from the first set of precursors;
• feeding the solid particles and a second set of precursors to a subsequent in sequence of the energy application zones along the flow path;
• and
• applying energy to the subsequent in sequence of the energy application zones effective to react and form solid material about the solid particles from the second set of precursors.

A particle forming method comprising:

• providing a reaction flow path comprising at least first and second spaced energy application zones, at least a first precursor inlet to the reaction flow path in advance of the first energy application zone, and at least a second precursor inlet to the reaction flow path between the first and second spaced energy application zones;
• feeding at least one precursor through the first inlet to the reaction flow path in advance of the first energy application zone;
• feeding the at least one precursor fed from the first precursor inlet along the reaction flow path to the first energy application zone;
• applying energy in the first energy application zone effective to react and form solid particles from the at least one precursor fed from the first inlet;
• feeding the solid particles from the first energy application zone along the reaction flow path to between the first and second spaced energy application zones;
• feeding at least one precursor through the second precursor inlet into the reaction flow path between the first and second energy application zones having the solid particles flowing therein;
• feeding the at least one precursor fed from the second precursor inlet and the solid particles along the reaction flow path to the second energy application zone;
• and
• applying energy in the second energy application zone effective to react and form solid material about the solid particles from the at least one precursor fed from the second inlet.