Porous getter devices with reduced particle loss and method for manufacturing same
AssigneeSaes Getters S.P.A.
InventorsAndrea Conte, Marco Moraja
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Abstract
A method for reducing the loss of particles from the surface of porous getter bodies is taught herein. The method consists in producing on the surface of the porous getter a thin layer of a metal or metal alloy with a deposition technique selected among the deposition of materials from arc generated plasma, ionic beam deposition and cathodic deposition. The deposition technique allows for granular or columnar surface of the covering material but still allowing access to the surface of the getter material, resulting in a reduced getter particle loss.
Claims20
A method for reducing the loss of particles on a porous getter device, comprising:
- choosing a deposit material compatible with the conditions of use of said porous getter device;
- and
- depositing a layer of said deposit material on a surface of a porous getter body, said layer being at least 0.5 μm;
- wherein said depositing is completed by a deposition technique, wherein said deposition technique is one of the group consisting of:
- definition arc generated plasma deposition, ion deposition, and cathodic deposition.
A porous getter body formed of particles of getter material connected together, wherein said getter particles at the upper surface of said body are partially covered with a deposit of a material selected from the group consisting of:
- transition metals, Rare Earths and aluminum;
- wherein said deposit has a thickness of at least 0.5 μm,
- whereby said deposit produces a reduced loss of particles in said porous getter body.
Dependencies are inferred from the claim text.