Silicon oxide membrane
AssigneeToyo Seikan Kaisha, Ltd.
InventorsTsunehisa Namiki, Toshihide Ieki, Hideo Kurashima, Hajime Inagaki, Akira Kobayashi, Koji Yamada, Miwako Tanikawa
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Abstract
A silicon oxide film is formed on the surfaces of a plastic substrate and contains methyl groups and methylene groups in a portion near the interface to the plastic substrate. The silicon oxide film exhibits not only excellent adhesion to the plastic substrate, softness and flexibility but also exhibits excellent gas shut-off property (gas barrier property), makes it possible to achieve excellent gas-shutoff property with a smaller film thickness than that of the conventional films, and can be mass-produced favorably.
Claims13
A silicon oxide film formed on the surfaces of a plastic substrate, wherein methyl groups and methylene groups are contained in the silicon oxide film in a portion near the interface to the plastic substrate.
Dependencies are inferred from the claim text.