Back to results
US 2003/0165639 A1Published application
Sputtering target assembly and sputtering apparatus using the same
AssigneeLG.Philips LCD Co., Ltd.
InventorJae Yeol Park
Life of this patent
Estimating the term…
Abstract
A sputtering target assembly includes a backing plate of which both surfaces are evenly formed and a target having one surface that is evenly formed and attached to one surface of the backing plate and the other surface that is formed with different thicknesses according to a location thereof.
Claims18
A method of manufacturing a liquid crystal display device comprising:
- forming a thin film transistor array substrate including a thin film layer, the thin film layer being made using a sputtering target assembly including a backing plate having first and second surfaces, the first and second surfaces being level;
- and a target having one level surface and attached to the first surface of the backing plate and another surface having a stepped portion, the target having different thickness portions corresponding to the stepped portion.
A sputtering target assembly comprising:
- a backing plate having first and second surfaces, the first and second surfaces being level;
- and
- a target having one level surface and attached to the first surface of the backing plate and another surface having stepped portion, the target having different thickness portions corresponding to the stepped portion.
A sputtering apparatus comprising:
- a sputtering target assembly including and a backing plate having first and second surfaces, the first and second surfaces being level;
- and a target having one level surface and attached to the first surface of the backing plate and another surface having stepped portion, the target having different thickness portions corresponding to the stepped portion;
- and
- a magnet below a bottom surface of the backing plate, the magnet generating a magnetic field to the targets.
1 more element
A sputtering target assembly comprising:
- a backing plate having first, second and third regions;
- a first target corresponding to the first region of the backing plate;
- a second target corresponding to the second region of the backing plate;
- and
- a third target corresponding to the third region of the backing plate, wherein the first target and the second target have different thickness.
2 more elements
Dependencies are inferred from the claim text.