Process for plasma surface treatment and device for realizing the process

Plasma treatment process of an object's surface to be treated, comprising the creation of a plasma, the application of the plasma to the surface to be treated, and the excitation of the surface to be treated so that it vibrates, wherein the frequency and amplitude of the vibrations of the object to be treated are measured by means of a vibration pickup in order to identify the eigenfrequencies of the object to be treated and/or to verify the excitation of the surface to be treated

Plasma treatment process of an object's surface to be treated, comprising the creation of a plasma, the application of the plasma to the surface to be treated, and the excitation of the surface to be treated so that it vibrates, wherein the plasma is generated by pulses, the lifetime of the plasma generated being longer than the period of wave motion of the surface to be treated.

Process according to the preceding claim, wherein the plasma pulse is generated by an essentially adiabatic and isentropic compression of a gaseous medium comprising a process gas that can be activated plasma-chemically.

Process according to the preceding claim, wherein the pulse length (t2) is inferior to the ratio between the width of a plasma filament applied to the surface to be treated, and the velocity of motion of the surface to be treated relative to the plasma.

Plasma treatment process of an object's surface to be treated, comprising the creation of a plasma, the application of the plasma to the surface to be treated, and the excitation of the surface to be treated so that it vibrates, wherein the plasma is fed successively with process gases having different compositions, for different successive treatments of the surface to be treated.

Process according to the preceding claim, wherein the process gases include argon, organometallic vapors such as those of silicon and oxygen, and hydrocarbons.

Device for a plasma treatment process of an object's surface to be treated, comprising the creation of a plasma, the application of the plasma to the surface to be treated, and the excitation of the surface to be treated so that it vibrates, comprising a device for plasma generation and a vibration pickup arranged so as to measure the vibrations emitted by the object to be treated, during the plasma surface treatment process.

Device for a plasma treatment process of an object's surface to be treated, comprising the creation of a plasma, the application of the plasma to the surface to be treated, and the excitation of the surface to be treated so that it vibrates, comprising a device for plasma generation and a laser system that can emit a laser beam across a wall of the object to be treated, and a sensor for the reflected laser beams or laser beams crossing the wall in order to detect the number of photons emitted by non-linear effects during passage of the laser beam across the surface treated, or the decrease in the flux of primary photons caused by their recombination due to non-linear effects.

Device for a plasma treatment process of an object's surface to be treated, comprising the creation of a plasma, the application of the plasma to the surface to be treated, and the excitation of the surface to be treated so that it vibrates, comprising a device for plasma generation and a liquid bath for immersion of the objects to be treated during the plasma surface treatment.

Device according to the preceding claim, wherein the cooling device blows air or another gas over the object to be treated, during or just after plasma application to the surface to be treated.

Device according to the preceding claim, wherein the electrode comprises a plurality of gas feed ducts.

Device according to the preceding claim, wherein the means for recording and checking the parameters are able to record and/or check the rising flank of the electric voltage and/or electric current pulse.

Device for a plasma treatment process of an object's surface to be treated, comprising the creation of a plasma, the application of the plasma to the surface to be treated, and the excitation of the surface to be treated so that it vibrates, comprising a device for plasma generation by electric discharge with an electrode in the form of a conducting liquid jet that can be directed against one wall of the object to be treated, on the side opposite to the surface to be treated.

Method of producing powder comprising the generation of a pulsed plasma in a chamber comprising plasma chemical gases, and the simultaneous generation of acoustic vibrations in the chamber, the gases being decomposed by the plasma to form clusters whose degree of structuration is determined by the simultaneous action of the plasma and acoustic vibrations.

Method according to the preceding claim, wherein the acoustic vibrations are generated by an external vibration generator.

Method according to the preceding claim, wherein the plasma is generated such that it produces shock waves during the plasma creation process generating the energy for the acoustic vibrations.

Method according to the preceding claim, wherein the duration of each plasma pulse is superior to the period of a vibration cycle of the acoustic vibrations.