US 2003/0165617 A1 · Method and appratatus for producing atomic flows of molecular gases

Abstract

A method and device are presented for producing an intensive flow of atoms from an input flow of a molecular gas. Effects of ignition of a gas discharge of a complex type and dissociation of the gas molecules by electron impact in a discharge cell are utilized. The flow of atoms is output from the discharge cell through at least one emitting aperture. The complex gas discharge is composed of a main discharge and two auxiliary discharges of different types ignited in substantially coinciding zones of the discharge cell. The main discharge is an arc Penning discharge ignited in the vicinity of at least one emitting aperture. The first auxiliary discharge is a magnetron discharge with heated cathode, and the second auxiliary discharge is either a Penning discharge, or a Penning discharge with hollow cathode. The dissociation of the gas molecules is thereby carried out in the complex discharge and results in creation of the flow of hot and thermally atoms.

Claims43

Dependent claims

A method of producing an intensive flow of atoms from an input flow of a molecular gas with a source comprising a discharge cell connectable to a direct current source and defining at least one emitting aperture through which the flow is output from the cell, the method utilizing ignition of a gas discharge in said discharge cell and dissociation of the gas molecules by electron impact, and comprising:

providing ignition of the gas discharge of a complex type composed of a main discharge and two auxiliary discharges of different types ignited in substantially coinciding zones of the discharge cell, wherein
said main discharge is an arc Penning discharge ignited in a zone of the vicinity of said at least one emitting aperture,
the first auxiliary discharge is a magnetron discharge with heated cathode, and
the second auxiliary discharge is one of the following:
a Penning discharge, and a Penning discharge with hollow cathode,
the dissociation of the gas molecules being thereby carried out in said complex discharge and resulting in creation of the flow of hot and thermally atoms.

3 more elements

A source device for producing an intensive flow of atomic or excited particles, the device being connectable to a direct current source and comprising an electrode' arrangement and a magnetic field source, wherein the electrode' arrangement comprises a cylindrical anode and a multiple-electrode cathode which are axially aligned and define an inter-electrode space for a longitudinal magnetic field region, wherein

the multiple-electrode cathode comprises a first elongated self-heating electrode, a second flat reflective electrode in which at least one opening forming at least one emitting aperture is made, and a third reflective electrode the first electrode being electrically connected to the third electrode, when the device is put in operation;
the first self-heating elongated electrode is axially aligned with the cylindrical anode and penetrates into the anode cavity at a predetermined distance;
a butt-end of the first electrode located inside the anode cavity, a part of the surface of the second electrode opposite a butt-end of the first electrode and the cylindrical anode form a cell of a main arc Penning discharge ignitable in at least one zone in the vicinity of said at least one emitting aperture;
the first electrode and the cylindrical anode form a cell of a first auxiliary discharge, which is a magnetron discharge with heated cathode;
and
the second and third reflective electrodes and the cylindrical anode form a cell of a second auxiliary discharge, which is one of the following:
a Penning discharge, and a Penning discharge with hollow cathode.

4 more elements

the electrode' arrangement comprises a cylindrical anode and a multiple-electrode cathode which are axially aligned and define an inter-electrode space for a longitudinal magnetic field region;
the multiple-electrode cathode includes a first elongated self-heating electrode, a second flat reflective electrode in which at least one opening forming at least one emitting aperture is made, and a third reflective electrode, the anode being located between the second and third electrodes, and the first electrode being connected to the third electrode, when the device is put in operation;
the first self-heating elongated electrode is axially aligned with the cylindrical anode and penetrates into the anode cavity at a predetermined distance, the first self-heating electrode passing through an opening made in a plate located above the anode, said opening having a cross-section equal to or slightly larger than the cross section of the first electrode;
the third electrode has a hollow cavity located above said anode cavity, said first electrode extending along the axis of the hollow cavity thereinside with a gap between the outer surface of the first electrode and the inner surface of the hollow cavity;
a butt-end of the first electrode located inside the anode cavity, a part of the surface of the second electrode opposite a butt-end of the first electrode and the cylindrical anode form a cell of a main arc Penning discharge ignitable in at least one zone in the vicinity of said at least one emitting aperture;
the first electrode and the cylindrical anode form a cell of a first auxiliary discharge, which is a magnetron discharge with heated cathode;
and
the second and third reflective electrodes and the cylindrical anode form a cell of a second auxiliary discharge, which is a Penning discharge.

5 more elements

Dependencies are inferred from the claim text.

Method and appratatus for producing atomic flows of molecular gases

Life of this patent

Method and appratatus for producing atomic flows of molecular gases

Life of this patent

Abstract

Claims43