Method for producing silicon nitride
OwnerNorbert Aunerinventor
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Abstract
A process for the production of silicon nitride (Si3N4) is described. According to this process nitrogen and/or nitrogen compounds are reacted with silicon and/or silicon compounds in a reaction chamber by means of a subgroup element or a subgroup element oxide. The process can be carried out in a simple and rapid manner and has a high yield.
Claims26
A process for the production of silicon nitride (Si3N4) according to which nitrogen and/or nitrogen compounds are reacted with silicon and/or silicon compounds in a reaction chamber by means of a subgroup element or subgroup element oxide.
The process according to one of the preceding claims, characterized in that in a first step, especially by external heating and/or carrying out a prereaction, the reaction with the subgroup element or subgroup element oxide is initiated.
The process according to one of the preceding claims, characterized in that the silicon and/or the silicon compounds together with the subgroup element or subgroup element oxide are preheated to 100-300° C. whereby the reaction 3Si+2N2→Si3N4 is initiated.
The process according to one of the preceding claims, characterized in that a mixture of silicon and/or a silicon compound and the subgroup element or subgroup element oxide is only used as igniting mixture in the reactor.
The process according to one of the preceding claims, characterized in that the reaction mixture is provided in a porous form and the nitrogen gas is passed through the mixture.
The process according to one of the preceding claims, characterized in that copper or copper oxide is used as subgroup element or subgroup element oxide.
The process according to one of the preceding claims, characterized in that the silicon and/or the silicon compounds are reacted as powder coated or mixed with the subgroup element or subgroup element oxide.
The process according to one of the preceding claims, characterized in that silicon hydrogen compounds, especially silanes, particularly silane oils, are used as silicon compounds.
The process according to one of the preceding claims, characterized in that the hydrogen of the silicon hydrogen compounds is burnt for the generation of high temperatures in the presence of an oxidizing agent supplying oxygen, whereupon the reaction of the nitrogen with the silicon by means of the subgroup element or subgroup element oxide is carried out.
The process according to one of the preceding claims, characterized in that hydrocarbon compounds with incorporated silicon atoms are used as silicon compounds.
The process according to one of the preceding claims, characterized in that the produced silicon nitride is reacted with a strong base or an aqueous solution thereof to obtain a silicate.
Dependencies are inferred from the claim text.