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AssigneeSumitomo Electric Industries, Ltd.
InventorsKiyotaka Murashima, Ken Hashimoto, Toshikazu Shibata, Akira Inoue, Masaki Ohmura, Masakazu Shigehara
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In this diffraction grating device manufacturing method, refractive-index-change-inducing light of a wavelength that induces a change in refractive index is irradiated onto an optical waveguide, thus forming a diffraction grating through refractive index modulation along the longitudinal direction of the optical waveguide. At this time, the position of irradiation of the refractive-index-change-inducing light onto the optical waveguide is swung in a direction perpendicular to the longitudinal direction of the optical waveguide.
A diffraction grating device manufacturing method, in which refractive-index-change-inducing light of a wavelength that induces a change in refractive index is irradiated onto an optical waveguide, thus forming a diffraction grating through refractive index modulation along the longitudinal direction of said optical waveguide;
A diffraction grating device manufacturing apparatus that irradiates refractive-index-change-inducing light of a wavelength that induces a change in refractive index onto an optical waveguide, thus forming a diffraction grating through refractive index modulation along the longitudinal direction of said optical waveguide, the diffraction grating device manufacturing apparatus comprising:
Dependencies are inferred from the claim text.