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US 2003/0165026 A1Published application
Optical attenuating device and method of manufacture therefor
AssigneeAgere Systems Inc.
InventorsMark M. Meyers, Daxue Xu
Life of this patent
Estimating the term…
Abstract
The present invention provides, in one aspect, an optical device, a method of manufacture therefor, and an optical system including the same. The optical device may include a membrane configured to be electrically deformable and reflective. The membrane may further be positioned over a cavity located within a substrate. The device may additionally include a transmissive spacer coupled to the substrate, and a lens coupled to the transmissive spacer and optically aligned with the membrane.
Claims20
An optical device, comprising:
- a membrane configured to be electrically deformable and reflective and positioned over a cavity located within a substrate;
- a transmissive spacer coupled to said substrate and located over said cavity;
- and
- a lens coupled to said transmissive spacer and optically aligned with said membrane.
1 more element
A method of manufacturing an optical device, comprising:
- positioning a membrane configured to be electrically deformable and reflective over a cavity located within a substrate;
- coupling a transmissive spacer to said substrate such that said transmissive spacer is located over said cavity;
- and
- coupling a lens to said transmissive spacer and optically aligned with said membrane.
1 more element
An optical system, comprising:
- an optical transmitter;
- an optical receiver;
- and
- an optical device array, including:
- membranes each configured to be electrically deformable and reflective and positioned over a corresponding one of a plurality of cavities located within a substrate;
- a transmissive spacer coupled to said substrate and located over each of said cavities;
- and
- a lens coupled to each of said transmissive spacers and optically aligned with each of said membranes.
5 more elements
Dependencies are inferred from the claim text.