Optical switching apparatus

Optical switching apparatus comprising,

• a header having a bottom wall and upwardly extending side walls forming a recess, a platform formed along the sidewalls spaced above the bottom wall,
• a micromirror assembly formed from a single piece of material having an outer frame portion lying in a plane and supported on the platform, an intermediate rotational gimbals portion hinged to the frame portion and movable relative to the frame portion about a first axis and an inner rotational mirror portion having a reflective, upper face surface hinged to the gimbals portion for movement of the mirror portion relative to the gimbals portion about a second axis, at least one magnet attached to one of the rotational portions, and
• at least one electromagnetic coil assembly disposed in close proximity to the mirror assembly for applying selected forces to the at least one magnet for causing desired movement of the gimbals portion and the mirror portion along the two axes to reflect an optical beam directed to the mirror portion in a selected direction.

A method for making a movable mirror comprising the steps of taking a piece of silicon and forming an outer frame portion, an intermediate gimbals portion connected by a hinge to the frame portion and an inner mirror portion connected by a hinge to the gimbals portion, attaching the mirror portion to the gimbals portion at locations on both sides of the respective hinge, attaching the gimbals portion to the frame portion at locations on each side of the respective hinge to prevent movement of the respective portions in a plane in which the piece lies and severing the attachment at each location at any selected time prior to use.