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US 2003/0164930 A1Published application
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorMasahiro Morisada
Life of this patent
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Abstract
When driving a stage (2), which is guided by an X moving member (3) and a Y moving member (4) that can move in directions perpendicular to each other, respectively, the posture of the Y moving member (4) is controlled on the basis of a signal which controls the posture of the X moving member (3).
Claims12
A stage alignment apparatus comprising:
- a first moving member which can move in a first direction;
- a second moving member which can move in a second direction different from the first direction;
- a stage which is slidably supported by said first moving member and second moving member and is guided in the first and second directions;
- a first control section which controls a posture, in a third direction different from the first and second directions, of said first moving member;
- and
- a second control section which controls a posture, in the third direction, of said second moving member on the basis of a signal which controls the posture of said first moving member.
3 more elements
A method of controlling a stage alignment apparatus for guiding a stage in a first direction and a second direction different from the first direction by a first moving member which can move in the first direction and a second moving member which can move in the second direction, comprising:
- the first control step of controlling a posture, in a third direction different from the first and second directions, of the first moving member;
- and
- the second control step of controlling the posture in the third direction of the second moving member on the basis of a signal which controls a posture of the first moving member.
Dependencies are inferred from the claim text.