Piezoelectric/electrostrictive device and method of manufacturing same

A method for producing a piezoelectric/electrostrictive device comprising a ceramic substrate and a piezoelectric/electrostrictive element formed on said ceramic substrate, said method including:

• a step for manufacturing said ceramic substrate by sintering a molding after forming said molding by using raw materials containing a ceramic material;
• and
• a step for forming said piezoelectric/electrostrictive element by a plurality of piezoelectric/electrostrictive layers and a plurality of electrode layers stacking alternately in a comb like structure on said ceramic substrate, wherein
• said step for forming said piezoelectric/electrostrictive element includes a step for forming one or more intermediate electrode layers at an intermediate portion of said piezoelectric/electrostrictive element by sintering a cermet film containing a conductive material and a piezoelectric/electrostrictive material to form said intermediate electrode layers.

A method for producing a piezoelectric/electrostrictive device comprising a ceramic substrate including fixed sections which have a large thickness and a pair of thin plate sections which are formed continuously from said fixed sections and which has a thin thickness, and a piezoelectric/electrostrictive element formed on said ceramic substrate,

• said method including:
• a step for forming a cermet paste by printing on opposing surfaces of a plurality of ceramic green sheets to be converted into said thin plate sections;
• a step for laminating said plurality of ceramic green sheets to form a ceramic green laminate;
• a step for sintering said ceramic green laminate to form a ceramic laminate;
• and
• a step for cutting off unnecessary portions after forming and sintering said piezoelectric/electrostrictive element on said ceramic laminate to manufacture said piezoelectric/electrostrictive device in which a second material is used between said pair of thin plate sections and said fixed sections.