Flip chip packaging using recessed interposer terminals
AssigneeMicron Technology, Inc.
InventorTeck Kheng Lee
Life of this patent
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Abstract
A method and apparatus for packaging a semiconductor die with an interposer substrate. The semiconductor device assembly includes a conductively bumped semiconductor die and an interposer substrate having multiple recesses formed therein. The semiconductor die is mounted to the interposer substrate with the conductive bumps disposed in the multiple recesses so that the active surface of the semiconductor die is directly mounted to a facing surface of the interposer substrate. One or more openings may be provided in an opposing surface of the interposer substrate which extends to the multiple recesses and the bumps disposed therein and dielectric filler material introduced through the one or more openings into to the recesses.
Claims76
A semiconductor device assembly comprising:
- a semiconductor die having an active surface and a back surface, said active surface having a plurality of spaced conductive bumps extending transversely therefrom;
- and
- an interposer substrate having first surface and a second, opposing surface, said interposer substrate comprising a dielectric member having a plurality of spaced recesses opening onto said first surface and extending through said dielectric member to conductive terminals at recess bottoms proximate said second surface;
- wherein at least one of said spaced conductive bumps is substantially received in each recess of said plurality in conductive contact with a conductive terminal.
A semiconductor device assembly comprising:
- a wafer having an active surface and a back surface and including a plurality of unsingulated semiconductor dice, each of said dice having a plurality of spaced conductive bumps on said active surface;
- and
- a wafer scale interposer superimposed on said wafer, having a first surface and a second surface and comprising a dielectric member, said wafer scale interposer including a plurality of unsingulated interposer substrates each sized and aligned with one of said plurality of semiconductor dice of said wafer, each of said interposer substrates having a plurality of recesses opening onto said first surface and extending through said dielectric member to conductive terminals at recess bottoms proximate said second surface;
- wherein at least one of said spaced conductive bumps is substantially received in each recess of said plurality in conductive contact with a conductive terminal.
An electronic system comprising:
- a processor device coupled to an input device and an output device;
- and
- a semiconductor assembly coupled to at least one of said processor device, said input device and said output device, said semiconductor assembly comprising:
- a semiconductor die having an active surface and a back surface, said active surface having a plurality of spaced conductive bumps extending transversely therefrom;
- and
- an interposer substrate having first surface and a second, opposing surface, said interposer substrate comprising a dielectric member having a plurality of spaced recesses opening onto said first surface and extending through said dielectric member to conductive terminals at recess bottoms proximate said second surface;
- wherein at least one of said spaced conductive bumps is substantially received in each recess of said plurality in conductive contact with a conductive terminal.
A semiconductor device assembly, comprising:
- a flexible interposer substrate including at least one conductive layer comprising a plurality of conductive traces and at least one dielectric member, the at least one dielectric member having a plurality of recesses extending from a surface of one side of the interposer substrate through the at least one dielectric member to expose portions of conductive traces of the plurality;
- the plurality of recesses being arranged in at least two patterns located on one side of the interposer substrate;
- and
- at least two semiconductor dice of flip-chip configuration having a plurality of conductive elements projecting therefrom, wherein each semiconductor die is operably coupled to at least some of the plurality of conductive traces by conductive elements received in a pattern of recesses;
- the interposer substrate being folded so that the at least two semiconductor dice operably coupled to conductive traces through a pattern of recesses on the one side of the interposer substrate are oriented in substantially superimposed back-to-back relationship between portions of the interposer substrate.
Dependencies are inferred from the claim text.