Saw device and method for manufacture thereof
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTakashi Inoue, Satoshi Matsuo, Akihiko Namba
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Abstract
A surface acoustic wave (SAW) device having improved moisture resistance is provided. The device includes a piezoelectric substrate, an interdigital transducer (IDT) electrode on a first surface of the piezoelectric substrate, and a resin coating for covering the IDT electrode. After a piece of resin material of the resin coating is dipped in an amount of pure water as solvent having a mass as 10 times great as the piece of resin material at 120° C. under 2 atom pressure for twenty hours, a concentration of chlorine ion in the solvent is not higher than 50 ppm
Claims19
A surface acoustic wave (SAW) device comprising:
- a piezoelectric substrate;
- an interdigital transducer (IDT) electrode on a first surface of said piezoelectric substrate;
- and
- a resin coating for covering said IDT electrode,
- wherein, after a piece of resin material of said resin coating is dipped in an amount of pure water as solvent having a mass as 10 times great as said piece of resin material at 120° C. under 2 atom pressure for twenty hours, a concentration of chlorine ion in said solvent is not higher than 50 ppm.
A method of manufacturing a surface acoustic wave (SAW) device, comprising the steps of:
- forming an interdigital transducer (IDT) electrode on a piezoelectric substrate;
- and
- covering over the IDT electrode with a resin material, wherein, after a piece of resin material of the resin coating is dipped in an amount of pure water as solvent having a mass as 10 times great as the piece of resin material at 120° C. under 2 atom pressure for twenty hours, a concentration of chlorine ion in the solvent is not higher than 50 ppm.
Dependencies are inferred from the claim text.