Semiconductor circuit arrangement and a method for producing same
OwnerChristian Herzum, Ulrich Krumbein +1inventors
InventorsChristian Herzum, Ulrich Krumbein, Karl-Heinz Muller
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Abstract
The invention relates to a semiconductor circuit arrangement comprising a circuit element that is embodied in a semiconductor substrate (1) of a first conductivity type in an integrated manner and is provided with at least one gate electrode (G1, G2) and a first (D) and a second electrode connection (S). According to the invention, the at least one gate electrode is at least partially silicated on the side thereof facing away from the main surface of the semiconductor substrate.
Claims20
A method for fabricating a semiconductor circuit arrangement having a circuit element which is formed in an integrated manner in a semiconductor substrate (1) of a first conductivity type and has at least one control terminal (G1, G2) and also a first (D) and second electrode terminal (S), characterized
- in that the at least one control terminal is siliconized at least in regions on its side remote from the main surface of the semiconductor substrate.
A semiconductor circuit arrangement having a circuit element which is formed in an integrated manner in a semiconductor substrate (1) of a first conductivity type and has at least one control terminal (G1, G2) and also a first (D) and second electrode terminal (S), characterized
- in that the at least one control terminal is siliconized at least in regions on its side remote from the main surface of the semiconductor substrate.
The semiconductor circuit arrangement as claimed in claims 11 to 14, characterized
- in that the at least one control terminal (G2) is only partly siliconized.
Dependencies are inferred from the claim text.