Back to results
US 2003/0164362 A1Published application
Pre-heating and loadlock pedestal material for high temperature CVD liquid crystal and flat panel display applications
AssigneeApplied Materials, Inc.
InventorsWilliam A. Bagley, Ericka M. Ramirez, Stephen C. Wolgast
Life of this patent
Estimating the term…
Abstract
A method and apparatus for supporting a substrate during a thermal process. In one embodiment, a substrate support is provided having a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon.
Claims18
An apparatus for supporting a glass substrate, comprising:
- a support element attachable to a chamber sidewall;
- and
- a plurality of support members disposed on an upper surface of the support element, the support members adapted to support the glass substrate in a spaced-apart relation to the support element, at least one of the support members comprising a surface coating at least partially disposed thereon.
An apparatus for supporting a glass substrate, comprising:
- a support element attachable to a chamber sidewall;
- and
- a first set of support members disposed on an upper surface of the support element and arranged to support a perimeter of the glass substrate placed thereon;
- a second set of support members disposed on the upper surface of the support element and arranged to support a central portion of the glass substrate,
- wherein the first and the second support members are adapted to support the glass substrate in a spaced-apart relation to the support element, and
- wherein the second set of support members each comprise a surface coating at least partially disposed thereon.
3 more elements
An apparatus for supporting a glass substrate, comprising:
- a shelf;
- and
- a plurality of support members disposed on an upper surface of the shelf and arranged to support the glass substrate in a spaced-apart relation to the shelf, the support members comprising a surface coating at least partially disposed thereon, wherein the surface coating comprises a material that reduces friction, reduces adhesion, and that is chemically inert with the glass substrate.
Dependencies are inferred from the claim text.