Slurry collection device and method
AssigneeInternational Business Machines Corporation
InventorsShunsuke Tanaka, Masami Shinohara, Kohichi Ishimoto
Life of this patent
Estimating the term…
Abstract
A slurry collection device 1 includes a ring-shaped barrier member 2 provided around a turntable T of a polishing machine E and a ring-shaped slurry collection container 3 provided around the barrier member 2. The turntable T is connected to an upper end of a main rotation shaft T1 that sticks out from a bottom portion of a sink S of the polishing machine E and is lifted from the bottom portion of the sink S. The slurry collection device 1 of the present invention is inserted between the turntable T and the sink S.
Claims14
A polishing machine having a slurry collection device comprising:
- a turntable;
- a slurry collection container provided around the turntable;
- and
- a barrier member for preventing or allowing the flow of a fluid comprising a slurry or water from the turntable into the slurry collection container.
A polishing machine having a slurry collection device comprising:
- a sink;
- a turntable lifted from a bottom of the sink;
- an inclined guide member provided around the turntable and moved up and down between a higher place and a lower place with respect to an upper surface of the turntable, and inclined outward in the radial direction of the turntable;
- a barrier member moved up and down with the inclined guide member and surrounding the upper surface of the turntable when the inclined guide member is moved up to the higher place;
- and
- a slurry collection container provided around the barrier member and placed just under an outer edge of the inclined guide member.
A slurry collection method comprising the steps of:
- supplying a fluid comprising a slurry or water to a turntable, wherein the fluid flows down from an edge of the turntable;
- moving a slurry collection device to a first position which collects the fluid from the turntable and recirculates it to the turntable;
- and
- moving the slurry collection device to a second position which deflects the fluid into a sink for discharging the fluid to a drain.
A method of activating a slurry collection device, comprising the steps of:
- moving up an inclined guide member which is provided around a turntable lifted from a bottom of a sink of a polishing machine and which is inclined outward in the radial direction of the turntable to a higher position than an upper surface of the turntable so as to surround the upper surface of the turntable with a barrier member connected to a lower surface of the inclined guide member and thereby leading the slurry dropping from the outer edge of the turntable by centrifugal force caused by the rotation of the turntable along an inner surface of the barrier member to the sink;
- and
- dropping the slurry into a slurry collection container provided just under an outer edge of the inclined guide member while the slurry dropping from the outer edge of the turntable is received by the inclined guide member by moving down the inclined guide member to a lower position than the upper surface of the turntable.
Dependencies are inferred from the claim text.