Buffer layer in flat panel display
AssigneeMicron Technology, Inc.
InventorsRobert J. Hanson, Won-Joo Kim, Mike E. Pugh
Life of this patent
Estimating the term…
Abstract
In devices such as flat panel displays, an aluminum oxide layer is provided between an aluminum layer and an ITO layer when such materials would otherwise be in contact to protect the ITO from optical and electrical defects sustained, for instance, during anodic bonding and other fabrication steps. This aluminum oxide barrier layer is preferably formed either by: (1) partially or completely anodizing an aluminum layer formed over the ITO layer, or (2) an in situ process forming aluminum oxide either over the ITO layer or over an aluminum layer formed on the ITO layer. After either of these processes, an aluminum layer is then formed over the aluminum oxide layer.
Claims35
A method of manufacturing a tin oxide/aluminum structure, comprising:
- forming a tin oxide layer;
- forming an aluminum oxide layer over the tin oxide layer;
- and
- forming a top aluminum layer over the aluminum oxide layer.
A tin oxide/aluminum structure, comprising:
- a tin oxide layer over a substrate;
- an aluminum oxide layer over the tin oxide layer;
- and
- an aluminum layer over the aluminum oxide layer.
A method of protecting an indium tin oxide layer in the presence of aluminum, comprising forming an aluminum oxide layer between the indium tin oxide layer and the aluminum.
A method of fabricating a display device structure, comprising:
- forming an indium tin oxide layer;
- forming an aluminum oxide layer over the tin oxide layer;
- forming an aluminum layer over the aluminum oxide layer;
- exposing the structure to an indium tin oxide-corrosive medium, the aluminum oxide preventing diffusion of the corrosive medium through the aluminum layer to the indium tin oxide layer;
- and
- removing the aluminum oxide and aluminum layers once the structure is no longer exposed to the indium tin oxide-corrosive medium.
A display device structure, comprising:
- a substrate;
- an electrically conductive and optically transparent layer over the substrate;
- an aluminum oxide layer over the electrically conductive and optically transparent layer;
- and
- an aluminum layer over the aluminum oxide layer.
A method for protecting the optical and electrical properties of an ITO layer for a flat panel display device during a spacer fabrication process using an aluminum bonding layer, comprising forming an aluminum oxide layer between the ITO layer and the aluminum bonding layer.
Dependencies are inferred from the claim text.