Method for making monolithic piezoelectric ceramic element
AssigneeMurata Manufacturing Co., Ltd.
InventorsToshiaki Kaji, Toshio Imanishi
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Abstract
A method for making a monolithic piezoelectric ceramic element having high mechanical strength, excellent piezoelectricity, and high reliability is disclosed. The method includes the steps of applying a conductive paste including a conductor containing Ag as a principal ingredient to ceramic green sheets comprising a piezoelectric ceramic material containing a Pb compound, stacking the ceramic green sheets to form a laminate, and firing the laminate in an atmosphere with an oxygen concentration of about 90% by volume or more during the heating period and with an oxygen concentration of about 5% to 15% by volume during the isothermal period and during the cooling period.
Claims16
A method for making a monolithic piezoelectric ceramic element comprising:
- providing a laminate which comprises a stack comprising a plurality of ceramic green sheets comprising a piezoelectric ceramic material containing Pb and a conductive paste comprising a conductor containing Ag as a principal ingredient disposed at an interface between one pair of adjacent sheets;
- and
- firing the laminate in a profile comprising a heating period, an isothermal period and a cooling period, wherein the firing is conducted in an atmosphere with an oxygen concentration of about 90% by volume or more during the heating period and with an oxygen concentration of about 5% to 15% by volume during the isothermal period and during the cooling period.
Dependencies are inferred from the claim text.