System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system

A CMP system comprising:

• a first pump having an input coupled to a first chemical supply;
• a first flow sensor coupled to an output of the first pump;
• a second pump having an input coupled to a second chemical supply;
• a second flow sensor coupled to an output of the second pump;
• a mixer having inputs coupled to the output of the first flow sensor and the output of the second flow sensor;
• and
• a controller configured to receive signals from the first and second flow sensors and to produce control signals for the first and second pumps and the mixer and configured to cause a mixture of the first and second chemicals upon a demand from a CMP process.

A mixing system comprising:

• a first pump having an input coupled to a first chemical supply;
• a first flow sensor coupled to an output of the first pump;
• a second pump having an input coupled to a second chemical supply;
• a second flow sensor coupled to an output of the second pump;
• a mixer having inputs coupled to the output of the first flow sensor and the output of the second flow sensor;
• and
• a controller configured to receive signals from the first and second flow sensors and to produce control signals for the first and second pumps and the mixer and configured to cause a mixture of the first and second chemicals upon a demand from a CMP process.