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AssigneeTokuyama Corporation
InventorsMasao Yamaguchi, Yoshihiro Hirota, Hiromasa Yamamoto
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A magnesium halide salt of a 2-alkyl-2-adamantanol is reacted with a carboxylic acid halide such as acrylic chloride or the like in the presence of a tertiary amine to produce a 2-alkyl-2-adamantyl ester (the first invention). A 2-alkyl-2-adamantanol is reacted with a carboxylic acid such as acrylic acid or the like in the presence of an acid catalyst such as concentrated sulfuric acid or the like and a drying agent composed of an acidic or neutral inorganic compound (e.g. magnesium sulfate) which is a solid at ordinary temperature in a dried state or of a water-absorbing high-molecular compound, to produce a 2-alkyl-2-admantyl ester (the second invention). The above ester is important as a raw material for a resist for semiconductor production.
A process for producing a 2-alkyl-2-adamantyl ester, which comprises reacting a magnesium halide salt of a 2-alkyl-2-adamantanol, represented by the following general formula (1):
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A process for producing a 2-alkyl-2-adamantyl ester, which comprises reacting a 2-alkyl-2-admantanol with a carboxylic acid compound in the presence of an acid catalyst and a drying agent composed of an acidic or neutral inorganic compound which is a solid at ordinary temperature in a dried state or of an acidic or neutral water-absorbing high-molecular compound which is a solid material at ordinary temperature in a dried state.
Dependencies are inferred from the claim text.