Electrically pumped long-wavelength vcsel and methods of fabrication

A method of fabricating a vertical cavity surface emitting laser comprising the steps of:

• providing a GaAs substrate oriented in one of the (211), (311), (411), and another off-axis crystallographic direction to improve the radiation efficiency of the vertical cavity surface emitting laser;
• epitaxially growing a first distributed Bragg reflector positioned on the GaAs substrate including a plurality of GaAs layers wherein each GaAs layer is sandwiched therebetween layers of an AlGaAs alloy and wherein the first distributed Bragg reflector is grown using Metalorganic Chemical Vapor Phase Epitaxy;
• epitaxially growing a first cladding layer positioned on the first distributed Bragg reflector;
• epitaxially growing an active region which is capable of emitting light, the active region having a thickness equal to approximately an integer multiple of one wavelength and is positioned on the first cladding layer wherein the active region include a plurality of quantum structures which include at least on InGaAsN alloy layer and wherein the active region is grown using Molecular Beam Epitaxy;
• epitaxially growing a second cladding layer positioned on the active region;
• and
• epitaxially growing a second distributed Bragg reflector positioned on the second cladding layer including a plurality of GaAs layers wherein each GaAs layer is sandwiched therebetween layers of a AlGaAs alloy and wherein the second distributed Bragg reflector is grown using Metalorganic Chemical Vapor Phase Epitaxy.

A method of fabricating a vertical cavity surface emitting laser comprising the steps of:

• providing a substrate;
• epitaxially growing a first distributed Bragg reflector positioned on the substrate wherein the first distributed Bragg reflector is doped p-type and includes a plurality of GaAs/AlGaAs layers which are grown using Metalorganic Chemical Vapor Phase Epitaxy;
• epitaxially growing a first cladding layer positioned on the first distributed Bragg reflector;
• epitaxially growing an active region capable of emitting light, the active region having a thickness equal to approximately an integer multiple of one wavelength positioned on the first cladding layer wherein the active region is doped n-type and includes a plurality of quantum structures with a bandgap which includes at least one layer of an InGaAsN alloy sandwiched therebetween a plurality of barrier layers and wherein the active region is grown using plasma assisted Molecular Beam Epitaxy;
• epitaxially growing a second cladding layer positioned on the active region;
• and
• epitaxially growing a second distributed Bragg reflector positioned on the second cladding layer wherein the second distributed Bragg reflector includes a plurality of GaAs/AlGaAs layers which are grown using Metalorganic Chemical Vapor Phase Epitaxy.

A method of fabricating a vertical cavity surface emitting laser comprising the steps of:

• providing a GaAs substrate oriented in one of the (211), (311), (411), and another off-axis crystallographic direction to improve the radiation efficiency of the vertical cavity surface emitting laser;
• epitaxially growing a first distributed Bragg reflector positioned on the GaAs substrate including a plurality of GaAs layers wherein each GaAs layer is sandwiched therebetween layers of an AlGaAs alloy;
• epitaxially growing a first cladding layer positioned on the first distributed Bragg reflector;
• epitaxially growing an active region which is capable of emitting light, the active region having a thickness equal to approximately an integer multiple of one wavelength and is positioned on the first cladding layer wherein the active region include a plurality of quantum structures which include at least one InGaAsN alloy layer;
• epitaxially growing a second cladding layer positioned on the active region;
• and
• epitaxially growing a second distributed Bragg reflector positioned on the second cladding layer including a plurality of GaAs layers wherein each GaAs layer is sandwiched therebetween layers of a AlGaAs alloy.