Semiconductor processing device, semiconductor processing system and semiconductor processing management method
AssigneeKabushiki Kaisha Toshiba
InventorHiroshi Matsushita
Life of this patent
Estimating the term…
Abstract
A semiconductor processing device includes a processing section to process a semiconductor substrate in accordance with job information which is used to process the semiconductor substrate; a imaging section to take an image of a processed portion of the semiconductor substrate upon each time of processing by said processing section; an image-processing section to convert any one and another of said images to image data which are different from each other in data volume, and to associate a result of processing from the processing section, said job information and said image data with each other in each processing; and an input/output section to output at least the result of processing and the image data.
Claims18
A semiconductor processing device comprising:
- a processing section to process a semiconductor substrate in accordance with job information which is used to process the semiconductor substrate;
- a imaging section to take an image of a processed portion of the semiconductor substrate upon each time of processing by said processing section;
- an image-processing section to convert any one and another of said images to image data which are different from each other in data volume, and to associate a result of processing from the processing section, said job information and said image data with each other in each processing;
- and
- an input/output section to output at least the result of processing and the image data.
A semiconductor processing system comprising:
- (a) a semiconductor processing device comprising:
- a processing section to process a semiconductor substrate in accordance with job information which is used to process the semiconductor substrate;
- a imaging section to take an image of a processed portion of the semiconductor substrate upon each time of processing by said processing section;
- an image-processing section to convert any one and another of said images to image data which are different from each other in data volume, and to associate a result of processing from the processing section, said job information and said image data with each other in each processing;
- and
- an input/output section capable of outputting at least the result of processing and the image data, and
- (b) a host computer being connected to the semiconductor processing device to input and store at least the result of processing and the image data which are output from the input/output section.
A semiconductor processing management method for a semiconductor processing device, which includes a processing section to process a semiconductor substrate, a imaging section to take an image of the semiconductor substrate upon processing by the processing section, and an image-processing section to process the image, comprising:
- processing the semiconductor substrate according to job information which is prepared for processing the semiconductor substrate;
- taking an image of the semiconductor substrate upon each time of processing by the processing section;
- converting any and another of the images to image data which are different from each other in data volume;
- associating the result of processing from the processing section, the job information and the image data with each other;
- and
- externally outputting at least the result of processing and the image data.
A semiconductor processing management method for a semiconductor processing device, which includes a processing section to process a semiconductor substrate, a imaging section to take an image of the semiconductor substrate upon processing by the processing section, and an image-processing section to process the image, comprising:
- processing the semiconductor substrate according to job information which is prepared for processing the semiconductor substrate;
- taking an image of the semiconductor substrate upon each time of processing by the processing section;
- digitally converting at least any one of the images to image data different in data volume, and not converting another of the images to image data;
- associating the result of processing from the processing section, the job information and the image data with each other;
- and
- externally outputting at least the result of processing and the image data.
Dependencies are inferred from the claim text.