Analyzing method for non-uniform-density sample and device and system thereof

An non-uniform-density sample analyzing method for analyzing distribution state of particle-like matter in a non-uniform-density sample, comprising:

• computing a simulated particle beam scattering curve under the same condition as a measuring condition of an actually measured particle beam scattering curve by using a scattering function expressing a particle beam scattering curve according to a fitting parameter indicating distribution state of particle-like matter;
• and
• carrying out fitting between the simulated particle beam scattering curve and the actually measured particle beam scattering curve while changing the fitting parameter,
• wherein the value of the fitting parameter when the simulated particle beam scattering curve agrees with the actually measured particle beam scattering curve serves to indicate the distribution state of the particle-like matter in the non-uniform-density sample.

An non-uniform-density sample analyzing device for analyzing distribution state of particle-like matter in a non-uniform-density sample, comprising:

• a function storage means for storing a scattering function expressing a X-ray scattering curve according to a fitting parameter indicating distribution state of particle-like matter;
• a simulating means for computing a simulated X-ray scattering curve under the same condition as a measuring condition of an actually measured X-ray scattering curve by using the scattering function from the function storage means;
• and
• a fitting means for carrying out fitting between the simulated X-ray scattering curve and the actually measured X-ray scattering curve while changing the fitting parameter,
• wherein the value of the fitting parameter when the simulated X-ray scattering curve agrees with the actually measured X-ray scattering curve serves to indicate the distribution state of the particle-like matter in the non-uniform-density sample.

An non-uniform-density sample analyzing device for analyzing distribution state of particle-like matter in a non-uniform-density sample, comprising:

• a function storage means for storing a scattering function expressing a particle beam scattering curve according to a fitting parameter indicating distribution state of particle-like matter;
• a simulating means for computing a simulated particle beam scattering curve under the same condition as a measuring condition of an actually measured particle beam scattering curve by using the scattering function from the function storage means;
• and
• a fitting means for carrying out fitting between the simulated particle beam scattering curve and the actually measured particle beam scattering curve while changing the fitting parameter,
• wherein the value of the fitting parameter when the simulated particle beam scattering curve agrees with the actually measured particle beam scattering curve serves to indicate the distribution state of the particle like matter in the non-uniform-density sample.