Method and apparatus for precision coating of molecules on the surfaces of materials and devices
AssigneeUniversity of Washington
InventorsBuddy D. Ratner, Frank Turecek, William T. Elam, Hak-No Lee, Kathryn J. Kitching
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Abstract
A method and apparatus for plasma treatment and deposition of ionized molecules on a surface of an object in a vacuum. In one embodiment the apparatus comprises a vacuum system having a plasma-treatment system and an ion deposition system.
Claims85
An apparatus for depositing ionized molecules onto a target surface of an object in a vacuum system, the apparatus comprising:
- an ion deposition system for depositing the ionized molecules onto the target surface;
- a plasma treatment system for plasma-treating the target surface;
- and
- a target guiding system to guide the target surface within the vacuum.
An apparatus for depositing ionized molecules on a target surface, the apparatus comprising:
- a deposition chamber in a vacuum system;
- an electrospray injector to generate ionized molecules and inject them into the vacuum system;
- an ion optics system in the vacuum system to guide ionized molecules to the deposition chamber;
- a plasma reactor in the vacuum system to treat the target surface;
- and
- a target surface transfer system to position the target surface within the apparatus.
A method of depositing ionized molecules on a surface of an object in a vacuum system, the method comprising:
- plasma-treating the surface of the object in the vacuum system;
- and
- depositing ionized molecules on the surface of the object in the vacuum system.
Dependencies are inferred from the claim text.