Mesoporous materials and methods
AssigneeUniversity of Massachusetts
InventorsJames J. Watkins, Rajaram Pai
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Abstract
Mesoporous articles and methods for making mesoporous articles are disclosed.
Claims98
A method for forming a mesoporous material, the method comprising:
- providing a template comprising a template material;
- permeating the template with a precursor;
- reacting the precursor within the template to form a deposit;
- and
- removing template material from the template to form the mesoporous material.
A method for forming a mesoporous article, the method comprising:
- forming a template from a template material, the template comprising a plurality of domains;
- permeating the template with a precursor;
- reacting the precursor within at least one domain of the template;
- and
- removing template material from the template to form the mesoporous article.
A method comprising:
- forming a template from a homopolymer;
- permeating the template with a precursor;
- and
- reacting the precursor within the template to form a deposit within the template.
A method for creating a metal oxide article, the method comprising:
- forming a template from a template material, the template comprising a plurality of domains;
- permeating the template with a metal oxide precursor;
- and reacting the precursor within at least one domain of the template to form a metal oxide.
A method for creating a structured article, the method comprising:
- forming a template layer from a template material;
- patterning the template layer to form a structured template;
- permeating the structured template with a precursor;
- and
- reacting the precursor within the structured template to form the structured article.
A method for creating a ordered article, the method comprising:
- applying a field external to a template material to assemble an ordered template from the template material;
- permeating the ordered template with a precursor;
- and
- reacting the precursor material within the ordered template.
A method for forming an integrated circuit, the method comprising:
- forming a template layer on a substrate, the template layer comprising a template material;
- permeating the template with a precursor;
- reacting the precursor within the template to form a deposit;
- removing the template material to form the dielectric layer;
- and
- processing the substrate or dielectric layer, or both, to create the integrated circuit.
A method for forming a coated optical component, the method comprising:
- providing an optical component;
- forming a template layer on a surface of the optical component, the template layer comprising a template material;
- permeating the template with a precursor;
- reacting the precursor within the template to form a deposit;
- and
- removing template material from the template to form a coating on the optical component.
A method for making a permeable membrane comprising a mesoporous layer, the method comprising:
- providing a porous substrate;
- forming a template layer on the substrate, the template layer comprising a template material;
- permeating the template with a precursor;
- reacting the precursor within the template to form a deposit;
- and
- removing template material from the template to form the mesoporous layer on the substrate, thereby forming a permeable membrane comprising pores having a characteristic dimension between about 5 Angstroms and about 2,500 Angstroms.
Dependencies are inferred from the claim text.