Patterning method
AssigneesSeiko Epson Corporation, Cambridge University Technical Services Limited
InventorTakeo Kawase
Life of this patent
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Abstract
A patterning method comprises selectively depositing droplets of a first material solvent solution onto a layer of a second material. The solvent is chosen to dissolve both materials, which are selected so as to exhibit phase separation upon the removal of the solution to provide domains of the first material embedded in and extending through the second material. By selection of appropriate materials the patterning method may be used, for example, to fabricate light emitting devices, optical colour filters, or vertical interconnects in electronic devices.
Claims55
A patterning method comprising depositing a layer of a first material, selectively depositing onto a first surface of the first material in the form of a droplet a solution of a second material in a solvent, the solvent being selected so as to be capable of also dissolving the first material, the first and second materials being selected such that phase separation occurs between the first and second materials upon removal of the solvent so as to provide at least one domain comprising the second material embedded in and extending through to a second surface of the layer of the first material, the second surface being opposite to the first surface.
A method as claimed in any one of the preceding claims, wherein the solvent is selected to comprise an aromatic and/or chlorinated hydrocarbon solvent.
A method according to any one of the preceding claims wherein the domains are arranged to have a thickness of less than about 500 nanometers.
A method as claimed in any one of the preceding claims wherein, when the first and or second materials comprise polymer materials, the polymer materials are selected so as to have a molecular weight of more than 1000.
A method as claimed in any one of the preceding claims wherein the size and/or the number of droplets is selectively controlled.
A method as claimed in any one of the preceding claims wherein drying of a droplet is assisted by elevating the temperature of the deposited droplets.
A method as claimed in any one of the preceding claims wherein drying of a droplet is assisted by a flow of gas.
A method as claimed in any one of the preceding claims wherein the droplet or droplets are deposited using an inkjet print head.
A method of manufacturing an electronic device comprising a method as claimed in any one of the preceding claims.
Dependencies are inferred from the claim text.