Fluidized bed activated by excimer plasma and materials produced therefrom

An apparatus for holding a fluidized bed activated by excimer plasma, said housing comprising:

• a fluidization chamber for holding polymeric beads or inorganic particles and gas, said fluidization chamber including an interior electrode contained within, comprising a conductive layer and a dielectric layer, and further, said fluidization chamber comprising at least one containment wall made from a dielectric material, said containment wall having an inside and an outside surface,
• an outer electrode surrounds at least part of the outside surface of the containment wall,
• a feed line in fluid communication with said fluidization chamber, said feed line for feeding plasma gas and/or reagents into said chamber,
• a porous base in fluid communication with said feed line, through which plasma gas passes from said feed line before entering said chamber, said porous base having pores of a diameter less than the diameter of beads or particles to be contained within the housing,
• a fluid exit in said at least one containment wall, and
• a radio frequency high voltage source, in electrical connection with both the interior and outside electrodes, for inducing ionization of the gas.