Polished polyimide substrate
OwnerJohn Farah, V. S. Sudarshanaminventors
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Abstract
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
Claims1
A substrate for a circuit structure comprising a planar substrate mass of polyimide material having a first side and a second side, said first side being polished to a surface smoothness between about 1 μinch and 20 μinch, capable of receiving a circuit structure, wherein said second side is polished, further comprising a first polymer layer applied to said first polished side of said planar substrate mass.
Dependencies are inferred from the claim text.