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US 2003/0156794 A1Published application
Tapered waveguide interconnection structure and method of fabricating the same
AssigneePacific Wave Industries, Inc.
InventorsMin-Cheol Oh, Harold R. Fetterman, William Steier, Joseph Michael
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Abstract
A tapered electrooptic (EO) polymer waveguide interconnection structure coupling an EO polymer waveguide and a passive polymer waveguide and a method of fabricating the same.
Claims21
A method of operably interconnecting an electrooptic (EO) polymer waveguide and a passive polymer waveguide, comprising:
- providing a tapered electrooptic (EO) polymer waveguide interconnection structure between an EO polymer waveguide and a passive polymer waveguide.
A method of fabricating a waveguide structure, comprising:
- coating a passive polymer lower cladding over a substrate;
- coating a passive core layer lower portion over the passive polymer lower cladding;
- curing the passive polymer lower cladding and the passive core layer lower portion;
- coating an electrooptic (EO) polymer layer over the passive core layer lower portion;
- etching the EO polymer layer to produce a tapered EO polymer layer with a tapered region;
- coating an passive core layer upper portion over the tapered EO polymer layer;
- etching the tapered EO polymer layer to produce a rib waveguide structure;
- and
- coating a passive polymer upper cladding over the rib waveguide structure.
6 more elements
A waveguide structure, comprising:
- an electrooptic (EO) polymer waveguide;
- a passive polymer waveguide;
- and
- a tapered EO polymer waveguide interconnection structure between the EO polymer waveguide and the passive polymer waveguide.
1 more element
Dependencies are inferred from the claim text.