Optical interconnection system in a microelectronic circuit produced on a soi substrate
OwnerSuzanne Colette Marion Laval, Alain Georges Henri Koster +2inventors
InventorsSuzanne Colette Marion Laval, Alain Georges Henri Koster, Daniel Albert Pascal, Francois Anceau
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Abstract
This invention relates to an optical interconnection system in a microelectronic circuit made on an SOI substrate (30), in other words a substrate with a silicon film (13, 33, 53) supported by a layer of electrically insulating material (32), the microelectronic circuit comprising at least one function block to be connected made in the silicon film. The system comprises at least one optical microguide composed of a strip (40) delimited in the silicon film by lateral confinement areas (41, 42) to connect the function block.
Claims8
Microelectronic circuit made on an SOI substrate (10, 30, 50) in other words a substrate with a silicon film (13, 33, 53) supported by a layer of electrically insulating material (12, 32, 52), the microelectronic circuit comprising at least one function block (56, 57) made in the silicon film,, the function block being connected by an interconnection system, characterised in that the interconnection system includes an optical interconnection system comprising at least one optical microguide composed of a strip (20, 40, 54, 55) delimited in the silicon film (13, 33, 53) by lateral confinement areas to connect the function block.
Process for making a microelectronic circuit on an SOI substrate (10, 30, 50), in other words a substrate with a silicon film (13, 33, 53) supported by an electrically insulating material layer (12, 32, 52), the microelectronic circuit then comprising at least one function block (56, 57) made in the silicon film and connected through an interconnection system, the process being characterised in that it comprises:
- steps for making the function block (56, 57),
- steps for making at least one optical microguide composed of a strip (20, 40, 54, 55) delimited in the silicon film (13, 33, 53) by lateral confinement areas in order to obtain an optical interconnection system for connection of the function block (56, 57).
Dependencies are inferred from the claim text.