PICA system detector calibration
AssigneeCredence Systems Corporation
InventorsGirish Dajee, Patricia Le Coupanec, Martin D. Leibowitz
Life of this patent
Estimating the term…
Loading patent…
AssigneeCredence Systems Corporation
InventorsGirish Dajee, Patricia Le Coupanec, Martin D. Leibowitz
Estimating the term…
Methods, apparatus and data structures useful in correcting PICA image data are described. An exemplary method comprises acquiring optical image data of a target having identifiable optical-image features, acquiring PICA image data of the target having identifiable PICA-image features corresponding to the optical-image features, matching PICA-image features with corresponding optical-image features, and calculating from matched PICA-image features and optical-image features a set of coefficients defining relationships between observed positions of PICA-image features and optical-image features. Corrections are applied to the observed positions of detected photons based on the coefficients. The coefficients may provide a local correction using a bilinear relationship giving the transformation of a rectangle formed by four features of the PICA-image data to fit a corresponding rectangle in the optical-image data. Alternatively, the coefficients may provide a global mapping function defining transformation of any point of the PICA-image data to fit a corresponding point in the optical-image data.
A method of correcting PICA image data, comprising:
Apparatus for preparing corrected PICA image data, comprising:
A data structure stored in a data-storage medium comprising a set of coefficients defining relationships between observed positions of features in PICA-image data and corresponding features in optical-image data.
Dependencies are inferred from the claim text.