Dual-wavelength X-ray reflectometry
AssigneeJordan Valley Applied Radiation Ltd.
InventorsBoris Yokhin, Isaac Mazor, Amos Gvirtzman
Life of this patent
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Abstract
A method for testing a surface includes finding respective first and second critical angles for total external reflection of radiation from an area of the surface at first and second wavelengths. The first and second critical angles are compared to determine an orientation of a tangent to the surface in the area.
Claims37
A method for testing a surface, comprising:
- finding respective first and second critical angles for total external reflection of radiation from an area of the surface at first and second wavelengths;
- and
- comparing the first and second critical angles to determine an orientation of a tangent to the surface in the area.
Apparatus for testing a surface, comprising:
- a radiation source, adapted to irradiate an area of the surface at first and second wavelengths;
- a detector, adapted to receive radiation reflected from the surface and to generate a signal responsive thereto;
- and
- a signal processor, coupled to receive and analyze the signal so as to find respective first and second critical angles for total external reflection of radiation from an area of the surface at the first and second wavelengths, and to compare the first and second critical angles to determine an orientation of a tangent to the surface in the area.
A crystal monochromator, comprising first and second crystal elements, having respective first and second crystal spacings chosen so that the crystal elements diffract radiation incident thereon at respective first and second wavelengths at a selected Bragg angle, the crystal elements having a curvature chosen so as to focus the radiation at the first and second wavelengths to a common focal area.
A method for testing a surface, comprising:
- finding respective first and second critical angles for total external reflection of radiation from an area of the surface at first and second wavelengths;
- and
- comparing the first and second critical angles to determine a property of the surface.
Apparatus for testing a surface, comprising:
- a radiation source, adapted to irradiate an area of the surface at first and second wavelengths;
- a detector, adapted to receive radiation reflected from the surface and to generate a signal responsive thereto;
- and
- a signal processor, coupled to receive and analyze the signal so as to find respective first and second critical angles for total external reflection of radiation from an area of the surface at the first and second wavelengths, and to compare the first and second critical angles to determine a property of the surface.
Dependencies are inferred from the claim text.