Laser alignment target and method
AssigneeInternational Business Machines Corporation
InventorsTimothy H. Daubenspeck, Richard A. Gilmour, William T. Motsiff, Christopher D. Muzzy
Life of this patent
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Abstract
A laser alignment target is provided having a surface that is out of plane with and has substantially the same first reflectivity as an adjacent surface of the semiconductor device, and a sidewall having a second reflectivity different than the first reflectivity. The target provides sidewalls that provide contrast for finding the target despite loss of contrast created by layers of dielectric over the target and use of short wavelength light.
Claims19
A laser alignment target comprising:
- a surface that is out of plane with and has substantially the same first reflectivity as an adjacent surface of the semiconductor device;
- and
- a sidewall having a second reflectivity different than the first reflectivity.
A semiconductor device comprising:
- a plurality of fuses provided on a first level of interconnect;
- and
- an alignment target including:
- a surface that is out of plane with and has substantially the same first reflectivity as an adjacent surface;
- and
- a sidewall having a reflectivity different than the first reflectivity.
A method of creating a laser alignment target, the method comprising:
- creating a surface having substantially the same first reflectivity as an adjacent surface;
- and
- forming sidewalls between the surface and the adjacent surface having a second reflectivity different than the first reflectivity.
Dependencies are inferred from the claim text.