Methods for affirming switched status of MEMS-based devices
AssigneeNetwork Photonics, Inc.
InventorsBevan Staple, Robert Anderson
Life of this patent
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Abstract
A configuration is provided by which it may be determined whether a MEMS device is in a select state. The select state is defined by a position of a moveable element, which is moved with electrostatic forces upon activation of an electrode. The select state is detected with a sensing configuration that has first and second regions. The regions are generally separated such that they are electrically uncoupled unless the moveable element is in the position that defines the select state. A detector may be provided to indicate whether the first and second regions are coupled electrically.
Claims27
A method for determining whether a MEMS device is in a select state defined by a position of a moveable element comprised by the MEMS device, the method comprising:
- changing a voltage of a first region of a sensing configuration;
- and
- measuring a second region of the sensing configuration,
- wherein the first and second electrically active regions are electrically coupled when the MEMS device is in the select state and electrically uncoupled when the MEMS device is not in the select state.
A MEMS device comprising:
- a moveable element configured to move to a position defining a select state of the MEMS device upon activation of an electrode;
- a sensing configuration having first and second regions, wherein the first and second regions are electrically coupled when the moveable element is in the position and electrically uncoupled when the moveable element is not in the position;
- and
- a detector configured to indicate when the first and second regions of the sensing configuration are electrically coupled.
A microstructure for steering light, the microstructure comprising:
- a substrate;
- a structural linkage connected with the substrate and supporting a moveable element disposed to orient a reflective coating;
- an electrode disposed to provide an electrostatic force on the moveable element upon actuation;
- and
- a sensing configuration having first and second regions that are electrically coupled only when the moveable element is in a position that defines a select state for the microstructure.
Dependencies are inferred from the claim text.