Anti-gravity mount with air and magnets
AssigneeNikon Corporation
InventorsKazuya Ono, Jean-Marc Gery
Life of this patent
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Abstract
An apparatus for providing support between a first structure and a second structure is described. The apparatus includes a supporting member, and first and second sections. The supporting member is mounted to the first structure and second structure, and has positive stiffness with respect to a lateral direction. The first section has at least one magnetic member, and is coupled to the first structure. The second section has at least one magnetic member, and is coupled to the second structure. The first and second sections present negative stiffness caused by magnetic attractive force at a neutral position, thereby canceling at least a part of the positive stiffness of the supporting member.
Claims33
An apparatus for providing support between a first structure and a second structure, comprising:
- a supporting member mounted to the first structure and second structure, the supporting member having positive stiffness with respect to a direction that differs from a support direction of the apparatus;
- a first section having at least one magnetic member, the first section being coupled to the first structure;
- and
- a second section having at least one magnetic member, the second section being coupled to the second structure;
- wherein
- the first and second sections present negative stiffness caused by magnetic force, thereby canceling at least a part of the positive stiffness of the supporting member.
A method of providing support between a first structure and a second structure, comprising:
- providing a supporting member mounted to the first structure and second structure, the supporting member having positive stiffness with respect to a direction that differs from a support direction of the apparatus;
- coupling a first section to the first structure, the first section has at least one magnetic member;
- and
- coupling a second section to the second structure, the second section has at least one magnetic member;
- wherein
- the first and second sections present negative stiffness caused by magnetic force, thereby canceling at least a part of the positive stiffness of the supporting member.
A lithography system comprising:
- an illumination system that irradiates radiant energy;
- a positioning apparatus that disposes a substrate on a path of the radiant energy;
- and
- a system that provides support between a first structure and a second structure, the system including,
- a supporting member mounted to the first structure and second structure, the supporting member having positive stiffness with respect to a first direction;
- a first section having at least one magnetic member, the first section being coupled to the first structure;
- and
- a second section having at least one magnetic member, the second section being coupled to the second structure;
- wherein
- the first and second sections present negative stiffness caused by magnetic force, thereby canceling at least a part of the positive stiffness of the supporting member.
Dependencies are inferred from the claim text.