MEMS devices and methods for inhibiting errant motion of MEMS components

Means for restricting displacement along a displacement path of an actuable element of a MEMS device so as to minimize derailing of the actuable element from a channel formed by at least one sidewall along the displacement path, comprising

• means for indenting the at least one sidewall to form opposed stop faces thereon,
• means for extending an arm portion of the actuable element to a position between the opposed stop faces, and
• means for maintaining a width between the at least one sidewall and the actuable element generally constant along the displacement path.

Means for restricting displacement along a displacement path of an actuable element of a MEMS device so as to minimize derailing of the actuable element from a channel formed by sidewalls along the displacement path, comprising

• means for offsetting the channel to form spaced apart stop faces on opposite sidewalls of the channel,
• means for offsetting the actuable element at a position between the stop faces to form offset faces on opposite sides of the actuable element and in opposing relationship to the stop faces, and
• means for maintaining a width between the sidewalls and the actuable element generally constant along the displacement path.

A method of restricting displacement along a displacement path of an actuable element of a MEMS device so as to minimize derailing of the actuable element from a channel formed by at least one sidewall along the displacement path, comprising

• indenting the at least one sidewall to form opposed stop faces thereon,
• extending an arm portion of the actuable element to a position between the opposed stop faces, and
• maintaining a width between the at least one sidewall and the actuable element generally constant along the displacement path.

A method of restricting displacement along a displacement path of an actuable element of a MEMS device so as to minimize derailing of the actuable element from a channel formed by sidewalls along the displacement path, comprising

• offsetting the channel to form spaced apart stop faces on opposite sidewalls of the channel,
• offsetting the actuable element at a position between the stop faces to form offset faces on opposite sides of the actuable element and in opposing relationship to the stop faces, and
• maintaining a width between the sidewalls and the actuable element generally constant along the displacement path.