MEMS actuators

A MEMS device comprising:

• a substrate,
• an actuable element,
• an actuator disposed on the surface of the substrate for selectively applying a first force to the actuable element to displace the actuable element along a displacement path,
• at least one control mechanism coupled to the actuable element at a first end and coupled to the substrate at a second end to control displacement of the actuable element along the displacement path, and
• a pin coupled to the substrate and positioned in a deflection path of the control mechanism, the pin altering a bending resistance of the control mechanism upon contact with the cantilever.

A MEMS device comprising:

• a substrate,
• an actuable element having a magnetic portion comprising a magnetic material,
• an electromagnetic MEMS actuator comprising an electrically conductive coil wound about a magnetic core, the coil and the magnetic core being arranged to generate a magnetic field within a gap formed by spaced apart ends of the magnetic core upon application of a current to the coil, the actuable element being displaceable along a displacement axis relative to the gap upon application of the magnetic field on the magnetic portion of the actuable element,
• a first cantilever coupled to the actuable element at a first end and coupled to the substrate at a second end,
• a second cantilever coupled to the actuable element at a first end and the substrate at a second end, and
• a pin coupled to the substrate and positioned in a deflection path of the first cantilever, the pin altering a bending resistance of the first cantilever upon contact with the first cantilever.

A MEMS device comprising:

• a substrate,
• an actuable element,
• an actuator disposed on the surface of the substrate for selectively applying a first force to the actuable element to displace the actuable element along a displacement path,
• at least one cantilever coupled to the actuable element at a first end and coupled to the substrate at a second end to control displacement of the actuable element along the displacement path, and
• means for altering a bending resistance of the cantilever during displacement of the actuable element.

A MEMS device comprising:

• a substrate,
• an actuable element,
• an actuator disposed on the surface of the substrate for selectively applying a first force to the actuable element to displace the actuable element along a displacement path,
• a mechanism for controlling displacement of the actuable element along the displacement path, and
• means for altering a spring constant of the mechanism for controlling displacement during displacement of the actuable element.