Adjustment-circuit embedded semiconductor sensor and torsion bar type torque sensor system

A torsion bar type torque sensor system, disposed between an input shaft and an output shaft, using an output-adjustment embedded semiconductor sensor that integrates a plurality of sections including:

• a detecting section for detecting at least either of a physical amount and a chemical amount as an electric amount;
• a thermal detecting section for detecting temperature;
• a non-volatile rewritable memory section for rewritably storing adjustment data to adjust an error of the detected electric amount;
• and
• an adjustment computation section for outputting an adjusted signal after offset adjustment of the detected electric amount, sensitivity adjustment and temperature adjustment, based on the detected temperature and the stored adjustment data, the torsion bar type torque sensor system comprising:
• an elastic member that combines the input shaft and the output shaft and converts torque to a torsion displacement;
• a ring magnet that, fixed coaxially with one of the input shaft and the output shaft, surrounds the elastic member and has circumferentially a plurality of first magnetic poles and a plurality of second magnetic poles, wherein each first pole and each second pole are alternately disposed at a predetermined circumferential pitch;
• and
• two magnetic yoke halves that, fixed coaxially with the other of the input shaft and the output shaft, face each other at a predetermined axial spacing and surround the ring magnet at a predetermined radial gap, wherein magnetic flux of the ring magnet flows sequentially through the two magnetic yoke halves,
• wherein the detecting section, disposed within the predetermined axial spacing between the two magnetic yoke halves, detects the magnetic flux modulated by an relatively rotated angle between the input shaft and the output shaft.