Semiconductor device and manufacturing method therefor
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Hisashi Ohtani, Toshiji Hamatani
Life of this patent
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Abstract
An active layer of an NTFT includes a channel forming region, at least a first impurity region, at least a second impurity region and at least a third impurity region therein. Concentrations of an impurity in each of the first, second and third impurity regions increase as distances from the channel forming region become longer. The first impurity region is formed to be overlapped with a side wall. A gate overlapping structure can be realized with the side wall functioning as an electrode.
Claims68
An active matrix display device comprising:
- at least one thin film transistor provided over a substrate;
- an interlayer insulating film over said at least one thin film transistor;
- a light emitting element provided over the interlayer insulating film and electrically connected to the thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a cover covering the light emitting element,
- wherein a gap between the light emitting element and said cover is filled with an adhesive.
An active matrix display device comprising:
- at least one thin film transistor provided over a substrate;
- an interlayer insulating film over said at least one thin film transistor;
- a light emitting element provided over the interlayer insulating film and electrically connected to the thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a cover covering the light emitting element,
- wherein a gap between the light emitting element and said cover is filled with a resin.
An active matrix display device comprising:
- a plurality of pixels arranged in a matrix form over a pixel portion of a substrate;
- at least one current control thin film transistor provided at each one of the plurality of pixels over the substrate;
- a driver circuit for driving said plurality of pixels, said driver circuit comprising thin film transistors formed over said substrate;
- an interlayer insulating film over said at least one current control thin film transistor and said driver circuit;
- a light emitting element provided over the interlayer insulating film and electrically connected to the current control thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a cover provided over said light emitting element and covering both said pixel portion and the driver circuit wherein said cover is fixed to said substrate by an adhesive,
- wherein said adhesive covers said pixel portion and said driver circuit.
An active matrix display device comprising:
- a plurality of pixels arranged in a matrix form over a pixel portion of a substrate;
- at least one current control thin film transistor provided at each one of the plurality of pixels over the substrate;
- a driver circuit for driving said plurality of pixels, said driver circuit comprising thin film transistors formed over said substrate;
- an interlayer insulating film over said at least one current control thin film transistor and said driver circuit;
- a light emitting element provided over the interlayer insulating film and electrically connected to the current control thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a cover provided over said light emitting element and covering both said pixel portion and the driver circuit,
- wherein a gap between the cover and said electro luminescent element is filled with a resin.
An active matrix display device comprising:
- at least one thin film transistor provided over a substrate;
- an interlayer insulating film over said at least one thin film transistor;
- a light emitting element provided over the interlayer insulating film and electrically connected to the thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a passivation layer formed on said second electrode;
- a cover covering the light emitting element,
- wherein a gap between said cover and said passivation layer is filled with an adhesive.
An active matrix display device comprising:
- at least one thin film transistor provided over a substrate;
- an interlayer insulating film over said at least one thin film transistor;
- a light emitting element provided over the interlayer insulating film and electrically connected to the thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a passivation layer formed on said second electrode;
- a cover covering the light emitting element,
- wherein a gap between said cover and said passivation layer is filled with a resin.
An active matrix display device comprising:
- a plurality of pixels arranged in a matrix form over a pixel portion of a substrate;
- at least one current control thin film transistor provided at each one of the plurality of pixels over the substrate;
- a driver circuit for driving said plurality of pixels, said driver circuit comprising thin film transistors formed over said substrate;
- an interlayer insulating film over said at least one current control thin film transistor and said driver circuit;
- a light emitting element provided over the interlayer insulating film and electrically connected to the current control thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a passivation layer formed over said second electrode and covering said light emitting element and said driver circuit;
- a cover provided over said passivation layer with an adhesive interposed therebetween.
An active matrix display device comprising:
- a plurality of pixels arranged in a matrix form over a pixel portion of a substrate;
- at least one current control thin film transistor provided at each one of the plurality of pixels over the substrate;
- a driver circuit for driving said plurality of pixels, said driver circuit comprising thin film transistors formed over said substrate;
- an interlayer insulating film over said at least one current control thin film transistor and said driver circuit;
- a light emitting element provided over the interlayer insulating film and electrically connected to the current control thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a passivation layer formed over said second electrode and covering said light emitting element and said driver circuit;
- a cover provided over said passivation layer wherein a gap between said cover and said passivation layer is filled with a resin.
An active matrix display device comprising:
- at least one thin film transistor provided over a substrate;
- an interlayer insulating film over said at least one thin film transistor;
- a light emitting element provided over the interlayer insulating film and electrically connected to the thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a passivation layer comprising silicon nitride formed on said second electrode;
- a cover covering the light emitting element,
- wherein a gap between said cover and said passivation layer is filled with an adhesive.
An active matrix display device comprising:
- at least one thin film transistor provided over a substrate;
- an interlayer insulating film over said at least one thin film transistor;
- a light emitting element provided over the interlayer insulating film and electrically connected to the thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a passivation layer comprising silicon oxynitride formed on said second electrode;
- a cover covering the light emitting element,
- wherein a gap between said cover and said passivation layer is filled with an adhesive.
An active matrix display device comprising:
- at least one thin film transistor provided over a substrate;
- an interlayer insulating film over said at least one thin film transistor;
- a light emitting element provided over the interlayer insulating film and electrically connected to the thin film transistor, said light emitting element including:
- a first electrode provided over said interlayer insulating film and electrically connected to said thin film transistor;
- a light emitting layer formed over the first electrode, said light emitting layer comprising an organic material;
- and
- a second electrode formed over the light emitting layer so that said light emitting layer is interposed between the first and second electrodes;
- a passivation layer comprising silicon oxynitride formed on said second electrode;
- a cover covering the light emitting element,
- wherein a gap between said cover and said passivation layer is filled with an adhesive, and light is emitted from said display device though said cover.
Dependencies are inferred from the claim text.